Design of vacuum magnetic sensor with multiple-pair anodes

With comprehensive computer simulation we designed a micro vacuum magnetic sensor with multiple-pair anodes. The design of the multiple-pair anode structure increased the sensitivity. The charge simulation method proved to be a fast and accurate way to calculate the internal electric field in the vacuum microelectronic (VME) device. Combined with the Fowler-Nordheim equation, it can calculate the dependence of emission current on applied voltage on the gate and the anode. SIMON software is useful in the calculation of electron trajectories. This feature greatly help the design of the VME device. However, in the case of the electric field calculation, the error is intolerant.