DocumentCode
3252576
Title
Microrelay matrices based on electrostatic operation principle
Author
Grigoriscin, I.L. ; Mukhurov, N.I.
Author_Institution
Inst. of Electron., Acad. of Sci., Minsk, Byelorussia
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
390
Lastpage
392
Abstract
Amorphous alumina prepared by anodic oxidation of aluminium is an excellent elastic material. This fact in conjunction with methods of formation of free-standing anodic alumina structures with controlled physicomechanical properties make it possible to develop microcommutation devices (microrelays) based on the electrostatic operation principle. The microrelay matrix proposed in this paper comprises three identical independent microcommutation devices formed on two alumina substrates.
Keywords
alumina; amorphous state; anodised layers; commutation; electrostatic devices; micromechanical devices; relays; Al/sub 2/O/sub 3/; amorphous alumina substrate; anodic oxidation; elastic material; electrostatic operation; free-standing structure; microcommutation device; microrelay matrix; Conducting materials; Electrostatics; Immune system; Materials science and technology; Microrelays; Semiconductivity; Semiconductor materials; Substrates; Switching circuits; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487073
Filename
487073
Link To Document