DocumentCode
3252898
Title
Point ion sources of Pt and Ir
Author
Golubev, O.L. ; Kontorovich, E.L. ; Shrednik, V.N.
Author_Institution
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
fYear
1995
fDate
July 30 1995-Aug. 3 1995
Firstpage
447
Lastpage
449
Abstract
High temperature field evaporation was used for creation of point ion sources of Pt and Ir ions. Field ion desorption microscopy was used for visualization of ionic beams in situ. It is typical both for Ir and for Pt to form a faceted built-up form with sharp vertexes in <023> directions as a result of a certain thermo-field treatment. The ion field evaporation beams from these vertexes were narrow and intensive enough and simultaneously geometrically stable. Details of formation and emission of such vertexes as well as some other forms are discussed.
Keywords
field evaporation; ion sources; iridium; platinum; Ir; Pt; facets; field ion desorption microscopy; high temperature field evaporation; ionic beams; point ion sources; thermo-field treatment; vertexes; Electron emission; Electron microscopy; Helium; Ion beams; Ion emission; Ion sources; Shape control; Temperature control; Temperature measurement; Visualization;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1995. IVMC., 1995 International
Conference_Location
Portland, OR, USA
Print_ISBN
0-7803-2143-X
Type
conf
DOI
10.1109/IVMC.1995.487086
Filename
487086
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