Micromachined thick-metal coplanar coupled-line filters and couplers

Author

Willke, T.L. ; Onggosanusi, E. ; Gearhart, S.S.

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

1

fYear

1998

fDate

7-12 June 1998

Firstpage

115

Abstract

Highly-coupled couplers (3-dB and 6-dB) are necessary for a wide range of millimeter-wave coplanar circuits. The high line-to-line capacitance required for these couplers is impossible to achieve with thin-film planar coupled lines. Using 80 /spl mu/m-thick conductors patterned using a 3-D X-ray micromachining technique, we have successfully demonstrated a 15 GHz 6-dB coupler and a single-section coupled-line BPF that utilizes a 3-dB coupler geometry.

Keywords

band-pass filters; capacitance; coplanar waveguides; micromachining; microwave filters; millimetre wave couplers; millimetre wave filters; passive filters; thick film devices; waveguide couplers; waveguide filters; 15 GHz; 3D X-ray micromachining technique; 80 micron; coplanar coupled-line filters; coupled-line BPF; high line-to-line capacitance; millimeter-wave coplanar circuits; thick conductors; thick-metal couplers; Band pass filters; Capacitance; Conductors; Couplers; Coupling circuits; Geometry; Micromachining; Millimeter wave circuits; Millimeter wave technology; Thin film circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1998 IEEE MTT-S International

Conference_Location

Baltimore, MD, USA

ISSN

0149-645X

Print_ISBN

0-7803-4471-5

Type

conf

DOI

10.1109/MWSYM.1998.689336

Filename

689336