The Analysis of Photoresist´s Absorption Spectrum by THz-TDS

Using terahertz time domain spectroscopy (THz-TDS), the photoresist´s absorption spectrum was measured in this paper. From the experimental data, A significant difference was found in the absorption between the exposure and unexposure photoresist. And we also discuss the requirements to sample preparation imposed by the lack of sharp spectral features in the absorption specra. The experimental results show that the THz-TDS is useful to measure the material spectra and can be effective to analysis their character.