DocumentCode
3255579
Title
0.6 μm BiCMOS based 15 and 25 V LDMOS for analog applications
Author
Kawaguchi, Yusuke ; Nakamura, Kazutoshi ; Karouji, Kumiko ; Watanabe, Kiminori ; Yamaguchi, Yoshihiro ; Nakagawa, Akio
Author_Institution
Discrete Semicond. Div., Toshiba Corp., Kawasaki, Japan
fYear
2001
fDate
2001
Firstpage
169
Lastpage
172
Abstract
In the present paper, we report the development of complementally 25 V LDMOS, 15 V n-ch LDMOS, 18 V npn/pnp and 5 V CMOS. The developed LDMOS achieved high on-state breakdown voltages for the gate voltage of 5.0 V. The on-resistance values of the developed 15 V and 25 V n-ch LDMOS achieves 22.7 and 27.5 mn mm2, respectively. The characteristics of bipolar transistors and CMOS are also sufficiently good
Keywords
BiCMOS analogue integrated circuits; power MOSFET; semiconductor device breakdown; 0.6 micron; 15 V; 25 V; BiCMOS analog IC; LDMOS transistor; on-resistance; on-state breakdown voltage; power MOSFET; Analog circuits; BiCMOS integrated circuits; Bipolar transistors; Breakdown voltage; Fabrication; Impurities; Indium tin oxide; MOS devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices and ICs, 2001. ISPSD '01. Proceedings of the 13th International Symposium on
Conference_Location
Osaka
ISSN
1063-6854
Print_ISBN
4-88686-056-7
Type
conf
DOI
10.1109/ISPSD.2001.934582
Filename
934582
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