• DocumentCode
    3255685
  • Title

    High frequency application of high transconductance surface-channel diamond field-effect transistors

  • Author

    Umezawa, Hitoshi ; Taniuchi, Hirotada ; Arima, Takuya ; Ishizaka, Hiroaki ; Fujihara, Naoki ; Ohba, Yoshikazu ; Tachiki, Minoru ; Kawarada, Hiroshi

  • Author_Institution
    Waseda Univ., Tokyo, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    195
  • Lastpage
    198
  • Abstract
    High frequency operations of diamond field-effect transistors (FETs) on the hydrogen-terminated surface channel are realized for the first time. The cut-off frequency (fT) and maximum oscillation frequency (fmax) of surface-channel diamond metal-semiconductor (MES)FET with 2 μm gate length are 2.2 and 7 GHz respectively. Due to the effect of gate insulator insertion, the source-gate capacitance (CGS) of surface-channel diamond (MIS) FET is reduced as half as that of diamond MESFETs. The 1 μm gate MISFET shows higher fT of 4.8 GHz and fmax of 11 GHz in spite of comparatively low transconductance. An fT of more than 20 GHz is expected at 0.5 μm gate MISFET, because transconductance of a 90 mS/mm diamond MISFET with 1 μm gate length has been already demonstrated
  • Keywords
    MISFET; Schottky gate field effect transistors; capacitance; diamond; elemental semiconductors; microwave field effect transistors; 11 GHz; 2.2 GHz; 20 GHz; 7 GHz; C; H-terminated surface channel; MESFET; MISFET; cut-off frequency; gate insulator insertion; high frequency operation; maximum oscillation frequency; source-gate capacitance; surface-channel diamond field-effect transistors; transconductance; Electrodes; FETs; Fabrication; MESFETs; MISFETs; Metal-insulator structures; Plasma measurements; Plasma temperature; Radio frequency; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 2001. ISPSD '01. Proceedings of the 13th International Symposium on
  • Conference_Location
    Osaka
  • ISSN
    1063-6854
  • Print_ISBN
    4-88686-056-7
  • Type

    conf

  • DOI
    10.1109/ISPSD.2001.934588
  • Filename
    934588