Title :
Broadband characterization of on-chip RF spiral inductor using multi-line TRL calibration
Author :
Shilimkar, Vikas S. ; Gaskill, Steven G. ; Weisshaar, Andreas
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Abstract :
We demonstrate characterization of an on-chip spiral inductor up to 40 GHz based on a one-tier multi-line TRL method and compare it with a conventional two-tier method. We provide details of the calibration standard design. Monte-Carlo based uncertainty analyses demonstrate the repeatability of the measurement results. A comparison of the measurement results with full-wave simulation results shows good agreement.
Keywords :
Monte Carlo methods; calibration; inductors; microprocessor chips; Monte-Carlo based uncertainty analysis; broadband characterization; calibration standard design; full-wave simulation; multiline TRL calibration; on-chip RF spiral inductor; one-tier multiline TRL method; through-reflect-line; Calibration; Inductors; Power transmission lines; Probes; Spirals; Standards; System-on-chip;
Conference_Titel :
Microwave Measurement Conference, 2013 82nd ARFTG
Conference_Location :
Columbus, OH
DOI :
10.1109/ARFTG-2.2013.6737354
