Title :
Development of Patent Filing Figures in the Field of Microelectromechanical Devices
Author :
Meister, M. ; McGinley, C.
Abstract :
The number of patent applications to the European Patent Office (EPO) in the field of micro structural technology/MEMS and neighbouring areas is presented and analysed. Various sectors like pressure sensors, accelerometers, microfluidics, ink-jet printheads and packages are distinguished and trends in the individual domains are put in relation to the overall evolution of the filing figures
Keywords :
micromechanical devices; patents; European Patent Office; microelectromechanical devices; patent filing figures; patent statistics; Accelerometers; Art; Microelectromechanical devices; Microfluidics; Micromechanical devices; Monitoring; Natural languages; Packaging; Protection; Statistics; MEMS; micromechanics; patent statistics;
Conference_Titel :
International Semiconductor Conference, 2006
Conference_Location :
Sinaia
Print_ISBN :
1-4244-0109-7
DOI :
10.1109/SMICND.2006.284017
