The Stability and The Nemi of Hall Magnetic Microsensors

Author

Panait, C. ; Caruntu, G.

Author_Institution

Maritime Univ. of Constantza

Volume

2

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

387

Lastpage

390

Abstract

In a system of measuring in which the Hall device is used as input transducer, its stability is essential for transfer constant of system. In this work is analyzed the variation of the charge carriers density on the stability of magnetic sensors realized on the MOS Hall plates. In the same time it is emphasized the way in which the adequate choice of the material properties and geometry of the device allow an increase in its stability. An essential parameter in the setting up of the performance of the measurement systems that use Hall microsensors is the mean square noise equivalent magnetic induction of these devices (NEMI). By using the numerical simulation the values of the NEMI for different structure devices are compared and it is also emphasized the way in which choosing the geometry and the material features allows getting high-performance sensors

Keywords

Hall effect transducers; MIS devices; electromagnetic induction; magnetic sensors; measurement systems; microsensors; numerical analysis; Hall device; Hall magnetic microsensors; MOS Hall plates; input transducer; mean square noise equivalent magnetic induction; measurement systems; numerical simulation; offset-equivalent magnetic induction; sheet resistance; surface charge density; Charge carrier density; Geometry; Magnetic analysis; Magnetic sensors; Material properties; Micromagnetics; Microsensors; Noise measurement; Stability analysis; Transducers; noise equivalent magnetic induction; offset-equivalent magnetic induction; sheet resistance; surface charge density;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.284026

Filename

4063254