DocumentCode :
3258511
Title :
Challenge To The 300mm Technology
Author :
Komiya, Hiroyoshi
fYear :
1997
fDate :
3-5 June 1997
Firstpage :
14
Lastpage :
17
Keywords :
Cost function; Crystalline materials; Delay; Investments; Lead compounds; Logic design; Optical materials; Production; Random access memory; Standardization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Conference_Location :
Taipei, Taiwan
ISSN :
1524-766X
Print_ISBN :
0-7803-4131-7
Type :
conf
DOI :
10.1109/VTSA.1997.614717
Filename :
614717
Link To Document :
بازگشت