DocumentCode
3258831
Title
Fabrication of a single CuO nanowire-based gas sensor working at room temperature
Author
Chaolei Huang ; Xiaojun Tian ; Jie Liu ; Wenxue Wang ; Zaili Dong ; Lianqing Liu
Author_Institution
State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
fYear
2013
fDate
26-30 Aug. 2013
Firstpage
108
Lastpage
113
Abstract
CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%.
Keywords
copper compounds; electrical conductivity; electrophoresis; field effect transistors; gas sensors; humidity sensors; microelectrodes; nanofabrication; nanosensors; nanowires; organic compounds; oxidation; semiconductor growth; semiconductor materials; CuO; DEP parameters; alcohol gas sensor; conductivity; copper foil; dielectrophoresis; field effect transistor; microelectrodes; p-type metal oxide semiconductor material; relative humidity; single nanowire-based device; single nanowire-based gas sensor; temperature 293 K to 298 K; thermal oxidation; Copper; Gas detectors; Humidity; Microelectrodes; Nanoscale devices; Nanowires; Temperature sensors; CuO nanowire; DEP; FET; alcohol gas sensor; assembly; dielectrophoresis; field effect transistor; humidity sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location
Suzhou
Print_ISBN
978-1-4799-1210-0
Type
conf
DOI
10.1109/3M-NANO.2013.6737394
Filename
6737394
Link To Document