• DocumentCode
    3258831
  • Title

    Fabrication of a single CuO nanowire-based gas sensor working at room temperature

  • Author

    Chaolei Huang ; Xiaojun Tian ; Jie Liu ; Wenxue Wang ; Zaili Dong ; Lianqing Liu

  • Author_Institution
    State Key Lab. of Robot., Shenyang Inst. of Autom., Shenyang, China
  • fYear
    2013
  • fDate
    26-30 Aug. 2013
  • Firstpage
    108
  • Lastpage
    113
  • Abstract
    CuO is an important p-type metal oxide semiconductor material and it has been used in many fields for its excellent physical and chemical properties, such as field effect transistors, photovoltaic cells, field emission nanodevices, and chemical and gas sensors. In this paper, CuO nanowires are synthesized by thermal oxidation of copper foil and suitable DEP parameters are chosen to assemble a single CuO nanowire on microelectrodes to fabricate a single CuO nanowire-based device. Experiments in this paper show that the single CuO nanowire-based device can work as field effect transistor and gas sensor. The single CuO nanowire device has a significant respond to the atmosphere with alcohol at room temperature, so it has potential to work as an alcohol gas sensor at room temperature. The single CuO nanowire device also has quick and significant respond to the humidity at room temperature and a novel liner relationship between conductivity and the relative humidity from 30% to 100%.
  • Keywords
    copper compounds; electrical conductivity; electrophoresis; field effect transistors; gas sensors; humidity sensors; microelectrodes; nanofabrication; nanosensors; nanowires; organic compounds; oxidation; semiconductor growth; semiconductor materials; CuO; DEP parameters; alcohol gas sensor; conductivity; copper foil; dielectrophoresis; field effect transistor; microelectrodes; p-type metal oxide semiconductor material; relative humidity; single nanowire-based device; single nanowire-based gas sensor; temperature 293 K to 298 K; thermal oxidation; Copper; Gas detectors; Humidity; Microelectrodes; Nanoscale devices; Nanowires; Temperature sensors; CuO nanowire; DEP; FET; alcohol gas sensor; assembly; dielectrophoresis; field effect transistor; humidity sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
  • Conference_Location
    Suzhou
  • Print_ISBN
    978-1-4799-1210-0
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2013.6737394
  • Filename
    6737394