The design and new controller of a 1-DOF precision positioning platform

This paper represents a new kind of 1-DOF precision positioning platform and its control methodology of a flexure-based mechanism. The platform is based on leaf parallelograms and bridge type mechanism. The piezoelectric actuator´s displacement is amplified with the bridge type mechanism and a set of leaf parallelograms provide decoupling effects. Based on fuzzy algorithm and PI controller, a new close-loop controller is proposed. This kind of controller combines controller based on fuzzy algorithm and PI controller. This method can reduce/eliminate the nonlinear behavior of the piezo-driven precision positioning platform, improving the dynamic performance of the entire system. This paper provides the guideline for the design of precision positioning platform and the control methodology of the flexure-based mechanism.