Dynamic analysis of an XY positioning table

Author

Fujun Wang ; Cunman Liang ; Zhipeng Ma ; Xingyu Zhao ; Yanling Tian ; Dawei Zhang

Author_Institution

Sch. of Mech. Eng., Tianjin Univ., Tianjin, China

fYear

2013

fDate

26-30 Aug. 2013

Firstpage

211

Lastpage

214

Abstract

The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and X-and Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X- and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.

Keywords

control system synthesis; graph theory; servomechanisms; state-space methods; LVCM; X-axes motion decoupling; X-axes servomechanisms; XY positioning table; Y-axes motion decoupling; Y-axes servomechanisms; bond graph method; controller design; dynamic analysis; dynamic modeling; flexible decoupling mechanism; linear voice coil motors; state space equations; Analytical models; Atmospheric modeling; Coils; Equations; Force; Friction; Mathematical model; Dynamic modeling; bond graph method; positioning;

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on

Conference_Location

Suzhou

Print_ISBN

978-1-4799-1210-0

Type

conf

DOI

10.1109/3M-NANO.2013.6737416

Filename

6737416