DocumentCode
3259367
Title
Self-testing of sigma-delta MEMS sensors using BIMBO
Author
Juillard, J. ; Colinet, E.
Author_Institution
SUPELEC, SSE, Gif-sur-Yvette
fYear
2007
fDate
5-8 Aug. 2007
Firstpage
1074
Lastpage
1077
Abstract
This paper deals with the test of sigma-delta MEMS sensors thanks to BIMBO, an identification method based on binary observations. We show how this method may be used in order to estimate the parameters of the sensing cell and of the associated analog electronics. The principle of the method and its theoretical properties are briefly presented and its pros and cons are discussed. Two approaches for the test of sigma-delta sensors are then presented and compared.
Keywords
identification; microsensors; testing; BIMBO; analog electronics; basic identification method-binary observations; sensing cell; sigma-delta MEMS sensors testing; Accelerometers; Automatic testing; Built-in self-test; Capacitive sensors; Costs; Delta-sigma modulation; Micromechanical devices; Parameter estimation; Parasitic capacitance; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2007. NEWCAS 2007. IEEE Northeast Workshop on
Conference_Location
Montreal, Que
Print_ISBN
978-1-4244-1163-4
Electronic_ISBN
978-1-4244-1164-1
Type
conf
DOI
10.1109/NEWCAS.2007.4488002
Filename
4488002
Link To Document