DocumentCode

3259393

Title

Composition changes in sputter deposition of Y-Ba-Cu-O films

Author

Hoshi, Y. ; Naoe, M.

Author_Institution

Tokyo Institute of Polytechnics

fYear

1989

fDate

28-31 March 1989

Keywords

Electron emission; Kinetic energy; Plasma temperature; Silicon; Sputtering; Substrates; Yttrium barium copper oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1989. Digests of INTERMAG '89., International

Conference_Location

Washington, DC, USA

Type

conf

DOI

10.1109/INTMAG.1989.690055

Filename

690055