3D micro probing systems for gear measurements with nanometer-scale deviation

Three-dimensional micro probing systems based on silicon force sensors allow force measurements in the range of several μN. Their high sensitivity enables tactile measurements of three-dimensional micro- and nanostructures without leaving strong traces on the probed surfaces. However, their small sizes of 6.5 mm × 6.5 mm do not allow an easy handling and can lead to a breakage of the complete system rapidly. To improve the handling and the integration of these micro probing systems a new kind of probe head and an appropriate assembling method have been developed. In order to show the performance and the high reproducibility of microprobes for their use in coordinate metrology, many measurements have been carried out with a customary gear measuring instrument on a calibrated spur gear. The results have been compared to calibration values and the deviations are in the range of maximum some 100 nm.