Title :
Optical super resolution technology and its application
Author :
Wang Nan ; Jiang Wei ; Yan Wei ; Hu Song
Author_Institution :
Inst. of Opt. & Electron., Chengdu, China
Abstract :
With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research.
Keywords :
image resolution; optical storage; photolithography; information technology; optical data storage; optical lithography; optical super resolution technology; Adaptive optics; Optical diffraction; Optical filters; Optical imaging; Optical polarization; Optical sensors; Optical surface waves; lithographic; optical data storage; optical super resolution;
Conference_Titel :
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on
Conference_Location :
Suzhou
Print_ISBN :
978-1-4799-1210-0
DOI :
10.1109/3M-NANO.2013.6737447
