Title :
Electron-beam-pulse induced time-domain depolarization in plasma deposited hydrogenated carbon-silicon films
Author :
Kazimierski, Piotr ; Tyczkowski, Jacek
Author_Institution :
Centre of Molecular & Macromolecular Studies, Polish Acad. of Sci., Lodz, Poland
Abstract :
In this paper an interesting extension of the VPITDD in the domain of shorter polarization times is presented. The results for plasma deposited carbon-silicon films are discussed in details
Keywords :
EBIC; carbon compounds; dielectric depolarisation; dielectric polarisation; hydrogen; plasma deposited coatings; semiconductor materials; semiconductor thin films; silicon compounds; transients; SiC:H; electron-beam-pulse induced time-domain depolarization; plasma deposited films; polarization time; semiconductor; transient currents; Aluminum; Current measurement; Electrodes; Electrons; Plasma measurements; Plasma properties; Polymer films; Time domain analysis; Time measurement; Voltage;
Conference_Titel :
Conduction and Breakdown in Solid Dielectrics, 1995. ICSD'95., Proceedings of the 1995 IEEE 5th International Conference on
Conference_Location :
Leicester
Print_ISBN :
0-7803-2040-9
DOI :
10.1109/ICSD.1995.523078
