DocumentCode :
3264130
Title :
Real time RHEED evaluation with the help of image processing
Author :
Nemcsics, Ákos ; Csutorás, Márton ; Tényi, Gusztáv ; Sándor, Tamás
Author_Institution :
Inst. for Microelectron. & Technol., Obuda Univ., Budapest, Hungary
fYear :
2010
fDate :
10-11 Sept. 2010
Firstpage :
631
Lastpage :
633
Abstract :
In this paper, the reflection high-energy electron diffraction (RHEED) pattern during the nano structure formation with the help of image processing is investigated. Nowadays, the growth of self-organised nano structures has been intensively investigated. It is very important to understand their growth process and the knowledge about their shape is particularly significant. The growth of these nano structures can be tracked in-situ manner with the help of RHEED. In-situ information about the stage of the process and the shape of the structure has been provided by RHEED. The temporal relation between the formation of the nano structure and the RHEED pattern is rather complicate. The image processing of the RHEED pattern help us to recognize and to interpret the metamorposis of the pattern during the growth process.
Keywords :
image recognition; molecular beam epitaxial growth; nanotechnology; physics computing; reflection high energy electron diffraction; shape recognition; diffraction pattern; growth process; image processing; image recognition; in-situ information; pattern metamorposis; real time RHEED evaluation; reflection high energy electron diffraction; self organised nanostructure; structure shape; Diffraction; Gallium; Image processing; Molecular beam epitaxial growth; Nanostructures; Shape; Three dimensional displays;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Systems and Informatics (SISY), 2010 8th International Symposium on
Conference_Location :
Subotica
Print_ISBN :
978-1-4244-7394-6
Type :
conf
DOI :
10.1109/SISY.2010.5647195
Filename :
5647195
Link To Document :
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