Preliminary results for a planar microdynamometer

Initial experiments with externally excited LIGA fabricated magnetic micromotors have shown that excitations required to overcome nickel to nickel sliding friction are reasonably low. These encouraging results have prompted an effort to integrate current excitation into the micromotor as well as to provide a test to quantitatively measure performance and frictional behavior of a magnetic micromotor. Such measurements may he made by use of a dynamometer which consists of a motor, a coupling gear train, a generator to act as an active load, and associated control electronics. Integration of such a micromechanical system requires extensions of the basic LIGA process. Problems with obtaining an electrodeposited material with reasonable magnetic properties must be resolved in order to complete the implementation.<>