Single crystal silicon nanomechanisms for scanned-probe device arrays

The authors discuss the fabrication and operation of movable, integrated nanostructure mechanisms that produce precision motion. Two single crystal silicon (SCS) processes are outlined: COMBAT and SCREAM-I. Examples of self supporting, movable single crystal silicon springs and electric-field drive structures and probes (tips) with dimensions as small as 20 nanometers are described. These integrated devices include integrated resonant mass sensors, precision x-y stages for instrument and sensor applications including scanned-probed structures. Movable mechanical structures with cross-sectional dimensions of 150 nm*1000 nm have been fabricated using single crystal silicon. The nanofabrication process includes high resolution e-beam lithography, anisotropic reactive ion etching, and selective oxidation of silicon. The mechanical resonant frequency for these nanomechanical structures can be greater than 5 MHz.<>