DocumentCode
3264470
Title
Technical Digest. IEEE Solid-State Sensor and Actuator Workshop [Front Cover]
fYear
1992
fDate
22-25 June 1992
Abstract
Presents the front cover from the conference proceedings.
Keywords
accelerometers; adhesion; chemical sensors; dynamometers; electric actuators; electric sensing devices; etching; integrated circuit technology; magnetometers; masks; micromechanical devices; nanotechnology; resonators; semiconductor technology; small electric machines; thin film devices; thin films; C films; IR detector; Si; SiO/sub 2/-B/sub 2/O/sub 3/; WO/sub 3/; accelerometers; adhesion; biochemical sensors; chemical sensors; circuit simulation tools; etching models; magnetic sensors; mask overlay; metal flexure actuators; microbial sensors; microdynamometers; micromagnetic actuators; micromotors; nanomechanisms; physical sensors; piezoresistors; pyrex thin-films; resonant devices; strain; thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location
Hilton Head Island, SC, USA
Print_ISBN
0-7803-0456-X
Type
conf
DOI
10.1109/SOLSEN.1992.228290
Filename
228290
Link To Document