Title :
Design, fabrication and testing of a miniature peristaltic membrane pump
Author :
Folta, J.A. ; Raley, N.F. ; Hee, E.W.
Author_Institution :
Lawrence Livermore Nat. Lab., CA, USA
Abstract :
A miniaturized peristaltic membrane pump has been designed, fabricated, and tested. Sequentially bulging three membranes into a flow channel is used to provide peristaltic pumping action. The deflection response of various membrane materials to applied pressure was measured to provide specifications for the flow channel which was designed and fabricated to closely match the shape of the bulging membranes. The pump has been designed to be driven with thermopneumatic actuators. An external pneumatic system is used to actuate the membranes to allow measurement and control of the actuation pressures required to demonstrate pumping action.<>
Keywords :
micromechanical devices; pneumatic control equipment; pumps; Si; actuation pressures; bulging membranes; deflection response; flow channel; integrated design; micromechanical devices; miniature peristaltic membrane pump; thermopneumatic actuators; thermopneumatic equipment; wafer; Actuators; Biomembranes; Control systems; Fabrication; Fluid flow measurement; Pneumatic systems; Pressure control; Pressure measurement; Shape measurement; Testing;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228296
