Title :
Chemical analysis and electrophoresis systems integrated on glass and silicon chips
Author :
Harrison, D.J. ; Seiler, K. ; Manz, A. ; Zhonghui Fan
Author_Institution :
Dept. of Chem., Alberta Univ., Edmonton, Alta., Canada
Abstract :
The feasibility of miniaturizing a chemical analysis system on a planar substrate has been demonstrated for a system utilizing electrokinetic phenomenon for sample separation and solvent pumping. Using micromachining techniques, a manifold of capillary channels has been fabricated in a planar glass substrate. Separation of components of a mixture using electrophoresis has been achieved within the channels using applied voltages of up to 10 kV. The separation efficiency was in agreement with theory, indicating no interactions between the analyte and the glass walls. Solvent flow could be directed along a specified capillary by application of appropriate voltages, so that valveless switching of fluid flow between capillaries could be achieved.<>
Keywords :
capillarity; chemical analysis; chemical sensors; electric sensing devices; electrophoresis; elemental semiconductors; glass; semiconductor technology; silicon; substrates; 10 kV; Si; capillary channels; chemical analysis; electrokinetic phenomenon; electrophoresis; feasibility; fluid flow; glass substrate; micromachining; planar substrate; sample separation; separation efficiency; solvent pumping; valveless switching; Chemical analysis; Chemistry; Electrokinetics; Fluid flow; Glass; Micromachining; Pumps; Silicon; Solvents; Voltage;
Conference_Titel :
Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE
Conference_Location :
Hilton Head Island, SC, USA
Print_ISBN :
0-7803-0456-X
DOI :
10.1109/SOLSEN.1992.228313