DocumentCode
3266229
Title
Tunable RF MEMS elements
Author
Tien, Norman C.
Author_Institution
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Volume
3
fYear
2004
fDate
18-21 Oct. 2004
Firstpage
1672
Abstract
A review of some of the work in tunable RF MEMS elements is presented. Discussed are a high-tuning range variable capacitor, a tunable microinductor, a switched inductor array and a MEMS capacitor immersed in a dielectric fluid. These devices expand the types of devices available to the RF designer for enhanced RF circuits.
Keywords
Q-factor; capacitors; circuit tuning; dielectric liquids; inductors; microfluidics; micromechanical devices; microswitches; Q-factors; continuously variable inductor; dielectric fluid immersed MEMS capacitor; high-tuning range variable capacitor; microfluidically tunable capacitors; switched inductor array; tunable RF MEMS elements; tunable microinductor; Capacitance; Capacitors; Fingers; Inductors; Q factor; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Tuning; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN
0-7803-8511-X
Type
conf
DOI
10.1109/ICSICT.2004.1435153
Filename
1435153
Link To Document