The study on a voltage controlled capacitor with complex membrane

Author

Wei, Jia ; Liu, Zewen ; Fang, Jie ; Xue Dong Liang ; Liu, Litian ; Li, Zhijian

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

3

fYear

2004

fDate

18-21 Oct. 2004

Firstpage

1707

Abstract

A study on the design and fabrication of a three-paired-electrodes voltage controlled capacitor (VCC) with complex membrane on a high-resistivity silicon substrate is reported. The complex membrane is composed of 0.8 micron Al and 0.15 micron SiON realized using sputtering and the PECVD process. The suspended membrane structure is obtained with polyimide as the sacrificial layer. The fabricated device was measured and survived for more than 1 million actuation times.

Keywords

aluminium; capacitors; chemical vapour deposition; membranes; micromechanical devices; silicon; silicon compounds; sputtering; substrates; 0.15 micron; 0.8 micron; Al; CVD process; RF MEMS device; SiON; actuation times; aluminium; complex membrane; high-resistivity silicon substrate; polyimide; sputtering; suspended membrane structure; three-paired-electrodes capacitor; voltage controlled capacitor; Aluminum; Biomembranes; Capacitors; Electrostatic measurements; Fabrication; Sputtering; Tensile stress; Thermal stresses; Voltage control; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on

Print_ISBN

0-7803-8511-X

Type

conf

DOI

10.1109/ICSICT.2004.1435161

Filename

1435161