Title :
Research on a seven-wafer Si-based combustor for micro power generation
Author :
Yufeng, Jin ; Chuan, Shan Xue ; Zhenfeng, Wang ; Wong, Stephen
Author_Institution :
Singapore Inst. of Manuf. Technol., Singapore
Abstract :
The paper presents preliminary results of our ongoing research program aimed at developing a seven-wafer Si-based combustor for micro power generation. An iterative computing process is developed for both system and components design. Primary results on fabrication of the micro combustor are described. Sealing a Kovar tube to the Si structure of the micro combustor by Kovar-glass-Si bonding is discussed. Instrumentation for testing the combustor is established. A temperature of 955°C near the exit of the combustor was observed.
Keywords :
combustion equipment; electric machine CAD; electric power generation; iterative methods; micromachining; micromechanical devices; silicon; small electric machines; Kovar tube; Kovar-glass-silicon bonding; Si; components design; iterative computing process; micro power generation; micromachining; power MEMS; seven-wafer silicon-based combustor; system design; Combustion; Engines; Fabrication; Fluid dynamics; Fuels; Micromechanical devices; Power generation; Silicon carbide; Temperature; Turbines;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435199
