• DocumentCode
    3267707
  • Title

    Numerical analysis of pull-in voltage in contact MEMS switch with double actuated electrodes

  • Author

    Jiang, Ling ; Shi, Yanling ; Liu, Yun ; Ren, Zheng ; Ding, Yanfang ; Lai, Zongsheng ; Ziqiang Zhu

  • Author_Institution
    Dept. of Electron. Sci. & Technol., East China Normal Univ., Shanghai, China
  • Volume
    3
  • fYear
    2004
  • fDate
    18-21 Oct. 2004
  • Firstpage
    1919
  • Abstract
    This paper presents the numerical analysis of pull-in voltage for a contact MEMS switch with a couple of electrodes. The lumped-model for double actuated coupled parallel-plate actuators is applied to describe the pull-in phenomenon. And based on the pull-in analysis results, some optimizing approaches are developed to lower the pull-in voltage for a contact MEMS switch.
  • Keywords
    electrostatic actuators; microswitches; optimisation; RF MEMS; contact MEMS switch; double actuated electrodes; double coupled parallel-plate actuators; electrostatic actuators; lumped-model; switch pull-in voltage optimization; Bridge circuits; Contacts; Electrodes; Micromechanical devices; Microswitches; Numerical analysis; Phase shifters; Residual stresses; Switches; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
  • Print_ISBN
    0-7803-8511-X
  • Type

    conf

  • DOI
    10.1109/ICSICT.2004.1435213
  • Filename
    1435213
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3267707