Title :
A low power consumption thermo-optic variable optical attenuator based on SOI material
Author :
Fang, Qing ; Li, Fang ; Wang, Chunxia ; Xin, Hongli ; Liu, Yuliang
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
Abstract :
A SOI thermo-optic variable optical attenuator with U-grooves based on a multimode interference coupler principle is fabricated. The dynamic attenuation range is 0 to 29 dB at the wavelength range between 1510 nm and 1610 nm, and the maximum power consumption is only 130 mW. Compared to the variable optical attenuator without U-groove, the maximum power consumption decreases more than 230 mW.
Keywords :
optical attenuators; power consumption; silicon-on-insulator; thermo-optical devices; 0 to 29 dB; 130 mW; 1510 to 1610 nm; SOI material; U-grooves; multimode interference coupler; power consumption; thermo-optic variable optical attenuator; Arm; Energy consumption; Etching; Interference; Optical attenuators; Optical coupling; Optical devices; Optical materials; Optical waveguides; Silicon;
Conference_Titel :
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on
Print_ISBN :
0-7803-8511-X
DOI :
10.1109/ICSICT.2004.1435237
