DocumentCode :
3270477
Title :
A simulation of backscattered electron microtomography in scanning electron microscope
Author :
Suzuki, Yusuke ; Yasuda, Masaaki ; Kawata, Hiroaki ; Hirai, Yoshihiko
Author_Institution :
Dept. of Phys. & Electron., Osaka Prefecture Univ., Japan
fYear :
2005
fDate :
25-28 Oct. 2005
Firstpage :
100
Lastpage :
101
Abstract :
In this paper, we attempt to reconstruct the tomographic image from the energy-filtered BSE signals calculated with a Monte Carlo simulation of electron scattering. We discuss the characteristics of the images for several types of sampled structures.
Keywords :
Monte Carlo methods; electron backscattering; optical tomography; scanning electron microscopes; BSE signals; Monte Carlo simulation; backscattered electron microtomography; electron scattering; scanning electron microscope; tomographic image reconstruction; Biomedical signal processing; Electronics industry; Image reconstruction; Inspection; Physics; Scanning electron microscopy; Scattering; Signal processing; Tomography; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN :
4-9902472-2-1
Type :
conf
DOI :
10.1109/IMNC.2005.203757
Filename :
1595233
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3270477
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