• DocumentCode
    327123
  • Title

    High sensitive thermal sensors in heat spreading diamond films for industrial applications

  • Author

    Bonhaus, Jörg ; Harlander, Thomas ; Borchert, Dietmar ; Ecke, Gernot ; Fontaine, Frédéric ; Fahrner, Wolfgang R.

  • Author_Institution
    Dept. of Electr. Eng., Hagen Univ., Germany
  • Volume
    1
  • fYear
    1998
  • fDate
    7-10 Jul 1998
  • Firstpage
    157
  • Abstract
    Diamond has been widely used as an electrical insulating heat spreading material in electronic thermal management applications since relatively cheap polycrystalline CVD diamond films have been available. In this work, the authors present the use of diamond heat spreaders in a single addressable diode laser array device which is useful for end-pumping solid state light. For this application, precise measurement and control of the junction temperatures of the diode lasers are required in order to control the wavelength of the emitted light. For this purpose, they inserted one thermistor per gap between all laser zones by doping the diamond substrates with boron. For the optimization of different doping profiles and metallization schemes were investigated with Auger and electrical measurements. They found out that the standard trilayer scheme (Ti/Pt/Au) can only be used below 700°C in contrast to the results which could be found in the literature. With their optimized thermistors, they are able to measure a shift of the wavelength of the emitted laser light due to a change of their temperature of less than 0.1 nm
  • Keywords
    diamond; doping profiles; films; semiconductor device metallisation; sensors; temperature measurement; thermal insulation; thermistors; Auger measurements; Ti-Pt-Au; diode laser array device; doping profiles; electrical measurements; electronic thermal management; end-pumping solid state light; heat spreading diamond films; high-sensitivity thermal sensors; industrial applications; junction temperature; metallization schemes; polycrystalline CVD diamond films; standard trilayer scheme; Dielectrics and electrical insulation; Diode lasers; Lighting control; Optical control; Semiconductor laser arrays; Temperature control; Thermal management of electronics; Thermal sensors; Thermistors; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Electronics, 1998. Proceedings. ISIE '98. IEEE International Symposium on
  • Conference_Location
    Pretoria
  • Print_ISBN
    0-7803-4756-0
  • Type

    conf

  • DOI
    10.1109/ISIE.1998.707768
  • Filename
    707768