DocumentCode
3271446
Title
Fabricaton of PDMS microlens for LIF detection
Author
Park, Sewan ; Jeong, Yongwon ; Kim, Jinseok ; Choi, Kihwan ; Kim, Hyeon Cheol ; Chung, Doo Soo ; Chun, Kukjin
Author_Institution
Sch. of Electr. Eng., Seoul Nat. Univ., South Korea
fYear
2005
fDate
25-28 Oct. 2005
Firstpage
206
Lastpage
207
Abstract
This paper presents PDMS microlens using photoresist reflow and molding method. This fabrication technique is simple and has good property in terms of the microlens. The microlens integrated on the microfluidic channel was verified to improve the fluorescent intensity, and consequently S/N ratio.
Keywords
fluorescence spectroscopy; microfluidics; microlenses; LIF detection; PDMS microlens; fabrication technique; microfluidic channel; molding method; photoresist reflow; Biomedical optical imaging; Fabrication; Fluorescence; Lenses; Microfluidics; Microoptics; Optical refraction; Resists; Scanning electron microscopy; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN
4-9902472-2-1
Type
conf
DOI
10.1109/IMNC.2005.203810
Filename
1595286
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