2D magnetic microsensor with on-chip signal processing for contactless angle measurement

Author

Haberli, A. ; Schneider, M. ; Malcovati, P. ; Castagnetti, R. ; Maloberti, F. ; Baltes, H.

Author_Institution

Lab. of Phys. Electron., Eidgenossische Tech. Hochschule, Zurich, Switzerland

fYear

1996

fDate

10-10 Feb. 1996

Firstpage

332

Lastpage

333

Abstract

This microsystem is the key element for accurate contactless angle measurements in combination with a permanent magnet. The system is based on a novel approach for signal processing using an on-board incremental ADC and a two-dimensional (2D) magnetic microsensor allowing 1/spl deg/ resolution. The system can be used for various wear-free angular positioning control systems in industrial and automotive applications.

Keywords

analogue-digital conversion; angular measurement; magnetic sensors; microsensors; spatial variables measurement; 2D magnetic microsensor; automotive applications; contactless angle measurement; industrial applications; on-board incremental ADC; on-chip signal processing; permanent magnet; wear-free angular positioning control systems; Circuits; Goniometers; Magnetic field measurement; Magnetic sensors; Micromagnetics; Permanent magnets; Sensor systems; Signal processing; Signal resolution; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 1996. Digest of Technical Papers. 42nd ISSCC., 1996 IEEE International

Conference_Location

San Francisco, CA, USA

ISSN

0193-6530

Print_ISBN

0-7803-3136-2

Type

conf

DOI

10.1109/ISSCC.1996.488641

Filename

488641