DocumentCode
3271535
Title
Design and fabrication of a MEMS-based electrolytic tilt sensor
Author
Kang, Ik-Su ; Jung, Ho ; Kim, Dong-Sun ; Kwon, Byong-Jo ; Kim, Chang Jin ; Kim, Woo-Jeong ; Choi, Sie-Young ; Lee, Jong-Hyun ; Shin, Jang-Kyoo ; Kong, Seong Ho
Author_Institution
Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., Daegu, South Korea
fYear
2005
fDate
25-28 Oct. 2005
Firstpage
216
Lastpage
217
Abstract
Tilt sensors are applied in a wide range of applications: antenna positioning, avionics, slope or tilt monitoring, vehicle attitude monitoring and so on. It is known the electrolytic type is one of the most enduring tilt sensors to date. This paper reports designing and fabrication of a MEMS-based electrolytic tilt sensor.
Keywords
electrolytic devices; microsensors; MEMS; electrolytic tilt sensor; Aerospace electronics; Bonding; Electrodes; Etching; Fabrication; Gas detectors; Glass; Gold; Monitoring; Surface resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2005 International
Print_ISBN
4-9902472-2-1
Type
conf
DOI
10.1109/IMNC.2005.203815
Filename
1595291
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