• DocumentCode
    3271579
  • Title

    Electromagnetic induction phenomena of nano-coil fabricated by FIB-CVD

  • Author

    Ozasa, Akinori ; Nakamatsu, Kazumi ; Kometani, R. ; Hoshino, Takayuki ; Kanda, Kazuhiro ; Haruyama, Yu-ichi ; Fujita, Jun-ichi ; Kaito, Takashi ; Matsui, Shinji

  • Author_Institution
    Graduate Sch. of Sci. LASTI, Hyogo Univ., Japan
  • fYear
    2005
  • fDate
    25-28 Oct. 2005
  • Firstpage
    222
  • Lastpage
    223
  • Abstract
    In this paper, we have demonstrated the observation of electromagnetic induction between two coils. Two nano-coils were fabricated extremely close to each other on electrodes by FIB-CVD. The SEM image of two nano-coils fabricated by FIB-CVD is shown. Phenanthrene (C14H10) source gas was used to make DLC coils.
  • Keywords
    chemical vapour deposition; coils; diamond-like carbon; electromagnetic induction; focused ion beam technology; nanowires; scanning electron microscopy; DLC coils; FIB-CVD; SEM; electrodes; electromagnetic induction phenomena; nano-coil fabricated; phenanthrene; Coils; Current measurement; Electrodes; Electromagnetic induction; Electromagnetic measurements; Electromagnets; Magnetic devices; Nanoscale devices; Nanotechnology; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2005 International
  • Print_ISBN
    4-9902472-2-1
  • Type

    conf

  • DOI
    10.1109/IMNC.2005.203818
  • Filename
    1595294