Fabrication of nano-structured optical devices using nanoimprint lithography

Summary form only given. In this presentation, we demonstrate the fabrication of a wire grid polarizer, a Bragg grating filters, and an optical ring resonator as working examples of NIL applied to the fabrication of nano-structured optical devices. The wire grid polarizer is one of representative subwavelength optical elements which make use of the form birefringence appearing in nanoscale structures. This work demonstrates the possibility of a low cost production of planar waveguide circuits for the optical communication.