Title :
Mesoscopic optical instrumentation: a miniature Fourier transform spectrometer
Author :
González, C. ; Smith, R.L. ; Collins, S.D. ; Sirota, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
We present a general methodology for the realization of practical micro-optical systems, specifically, a miniature Fourier transform spectrometer, through the use of a newly developed microfabrication technique called microjoinery. Using microjoinery, we have microfabricated a number of translational and positioning stages ideally suited for use in micro-optical systems
Keywords :
Fourier transform spectrometers; mesoscopic systems; optical fabrication; mesoscopic optical instrumentation; microfabrication technique; miniature Fourier transform spectrometer; positioning stages; practical micro-optical systems; translational stages; Fourier transforms; Instruments; Mirrors; Optical devices; Optical films; Optical interferometry; Optical recording; Silicon; Space technology; Spectroscopy;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.645524
