Title :
A room temperature NbN bolometer for terahertz detection
Author :
Lu, X.H. ; Kang, L. ; Chen, J. ; Zhong, Y.Y. ; He, N. ; Jiang, Y. ; Liang, M. ; Yao, Q.J. ; Shi, S.C.
Author_Institution :
Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing
Abstract :
Using RF magnetron sputtering and electronic beam lithography, a NbN microbolometer integrated with a planar logarithm periodic antenna is fabricated on a SiO2/Si (100) substrate for detecting signals from 0.05 THz to 0.4 THz. The best attainable responsivity of the device is about 100 volts per watt at 300 K.
Keywords :
bolometers; electron beam lithography; niobium compounds; sputter deposition; superconducting materials; superconducting microwave devices; superconducting thin films; terahertz wave detectors; NbN; RF magnetron sputtering; SiO2-Si; electronic beam lithography; frequency 0.05 THz to 0.4 THz; planar logarithm periodic antenna; room temperature NbN microbolometer; temperature 293 K to 298 K; temperature 300 K; terahertz detection; Bolometers; Lithography; Radio frequency; Sputtering; Substrates; Superconducting films; Superconducting magnets; Temperature sensors; Thermal conductivity; Thermal resistance;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665411
