Dynamic analysis of Nano-precision stage with aerostatic bearing

Author

Tian, Cai ; Ming, Zhang ; Yu, Zhu ; Jing, Wang

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2011

fDate

15-17 April 2011

Firstpage

3221

Lastpage

3224

Abstract

The dynamic performance of a Nano-precision stage equipped with aerostatic bearing was studied. A dynamic modeling method for the stage was presented. In the method, general equation of dynamics with virtual power form and analysis of rigid body finite rotation were used to analyze the dynamic characteristic of stage and the influence of aerostatic bearing when positioning, and the motion differential equations which could be use for controller design and optimization were obtained. The vibration characteristic of the stage was analyzed based on the motion differential equations and the natural frequency caused by air bearing was calculated. A model test experiment was carried out and the experiment results showed the validity of the method.

Keywords

control system synthesis; differential equations; machine bearings; precision engineering; vibrations; aerostatic bearing; air bearing; controller design; dynamic equation; dynamic modeling method; motion differential equations; nanoprecision stage; rigid body finite rotation; vibration characteristic; virtual power form; Aerodynamics; Atmospheric modeling; Differential equations; Mathematical model; Optimization; Three dimensional displays; Nano-precision stage; aerostatic bearing; dynamic analysis; model test;

fLanguage

English

Publisher

ieee

Conference_Titel

Electric Information and Control Engineering (ICEICE), 2011 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-8036-4

Type

conf

DOI

10.1109/ICEICE.2011.5777319

Filename

5777319