Title :
A thermodynamic model for electrical current induced damage
Author :
Basaran, Cemal ; Minghui Lin ; Ye, Hua
Author_Institution :
Dept of Civil, Struct. & Environ. Eng., State Univ. of New York, Buffalo, NY, USA
Abstract :
Electromigration induced damage, which is in principal an irreversible mass diffusion under high current density, has been a concern for VLSI design for a long time. Miniaturization of electronic device sizes down to nano-scale will make electromigration a concern for all conducting components. This paper uses thermodynamics, statistical mechanics and mass transport (diffusion) principals to propose a model for electromigration process and a damage evolution model to quantify the degradation in microelectronics (and Micro Electro Mechanical System) solder joints subjected to high current densities. Entropy production in the system is used as a damage metric. The irreversible thermodynamic damage model utilized in this work has previously been successfully applied to thermomechanical fatigue of microelectronic solder joints. In this paper we extend this model to electromigration-induced degradation. Electromigration process is modeled by the atomic vacancy flux (mass diffusion) process. The proposed unified model is compared with several existing analytical and empirical models. A comparison of the damage evolution model proposed in here agrees well with empirical models proposed in the literature.
Keywords :
VLSI; boundary-value problems; continuum mechanics; current density; electromigration; entropy; finite element analysis; integrated circuit interconnections; integrated circuit reliability; irreversible thermodynamics; mass transfer; soldering; solders; thermal management (packaging); thermal stress cracking; VLSI; arbitrary boundary value problem; atomic vacancy flux process; continuum mechanics; damage evolution model; electrical current induced damage; electromigration induced damage; entropy production; high current density; irreversible mass diffusion; irreversible thermodynamics; mass transport; microelectronics solder joints; statistical mechanics; thermodynamic model; thermomechanical fatigue; Current density; Degradation; Electromigration; Entropy; Mechanical systems; Microelectronics; Nanoscale devices; Soldering; Thermodynamics; Very large scale integration;
Conference_Titel :
Electronic Components and Technology Conference, 2004. Proceedings. 54th
Print_ISBN :
0-7803-8365-6
DOI :
10.1109/ECTC.2004.1320353