Title :
THz ellipsometry in theory and experiment
Author :
Dietze, Daniel ; Kelly, Damien P. ; Darmo, Juraj ; Unterrainer, Karl
Author_Institution :
Photonics Inst., Vienna Tech. Univ., Vienna
Abstract :
In this work, we discuss several versions of ellipsometry in the THz spectral region and present the underlying theory. A THz TDS ellipsometry setup is demonstrated experimentally, which is suited for industrial applications on non-destructive semiconductor characterization.
Keywords :
ellipsometry; nondestructive testing; semiconductor materials; submillimetre wave spectra; TDS; ellipsometry; nondestructive testing; semiconductor materials; terahertz spectra; Antenna measurements; Conductivity measurement; Dipole antennas; Ellipsometry; Frequency; Gallium arsenide; Optical polarization; Optical surface waves; Plasma measurements; Semiconductor materials;
Conference_Titel :
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location :
Pasadena, CA
Print_ISBN :
978-1-4244-2119-0
Electronic_ISBN :
978-1-4244-2120-6
DOI :
10.1109/ICIMW.2008.4665575
