DocumentCode
3275564
Title
THz ellipsometry in theory and experiment
Author
Dietze, Daniel ; Kelly, Damien P. ; Darmo, Juraj ; Unterrainer, Karl
Author_Institution
Photonics Inst., Vienna Tech. Univ., Vienna
fYear
2008
fDate
15-19 Sept. 2008
Firstpage
1
Lastpage
1
Abstract
In this work, we discuss several versions of ellipsometry in the THz spectral region and present the underlying theory. A THz TDS ellipsometry setup is demonstrated experimentally, which is suited for industrial applications on non-destructive semiconductor characterization.
Keywords
ellipsometry; nondestructive testing; semiconductor materials; submillimetre wave spectra; TDS; ellipsometry; nondestructive testing; semiconductor materials; terahertz spectra; Antenna measurements; Conductivity measurement; Dipole antennas; Ellipsometry; Frequency; Gallium arsenide; Optical polarization; Optical surface waves; Plasma measurements; Semiconductor materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location
Pasadena, CA
Print_ISBN
978-1-4244-2119-0
Electronic_ISBN
978-1-4244-2120-6
Type
conf
DOI
10.1109/ICIMW.2008.4665575
Filename
4665575
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