System performance of PSI technique as a function of key parameters

Phase stepped interferometry (PSI) technique uses a charge coupled device (CCD) camera for intensity image acquisition and allow for near real-time full field object displacement measurements. Since this technique deals with nanometer level displacements, accuracy is a big factor for this method. System parameters of this technique control the accuracy of the measurement and hence determine the system´s performance. In this paper an effort is made to explain the characteristics of the key parameters and their role in determining system´s performance. The optimum value of the parameters have been chosen after a careful observation. A simulated result has also been presented using the valve of the parameters in order to show the importance of key parameters on system´s performance