DocumentCode
3276430
Title
The research of the stochastic reward net model for the cluster tool in serial-parallel mode
Author
Zheng, Xiuhong ; Hu, Jingtao ; Yu, Haibin
Author_Institution
Key Lab. of Ind. Inf., Shenyang Inst. of Autom., Shenyang, China
fYear
2011
fDate
15-17 April 2011
Firstpage
870
Lastpage
874
Abstract
The proliferation of cluster tools in semiconductor manufacturing motivates an understanding of how basic parameters determine the performance of cluster tools. This paper presents three general stochastic reward net models of serial-parallel cluster tools to describe the processing procedure of them. They help to effectively analyze and evaluate the performance of cluster tools on different demands.
Keywords
Petri nets; manufacturing systems; semiconductor device manufacture; stochastic processes; semiconductor manufacturing; serial-parallel cluster tools; stochastic reward net model; Analytical models; Load modeling; Robots; Schedules; Semiconductor device modeling; Stochastic processes; Throughput; The cluster tool; model; serial-parallel; stochastic reward net; throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location
Wuhan
Print_ISBN
978-1-4244-8036-4
Type
conf
DOI
10.1109/ICEICE.2011.5777418
Filename
5777418
Link To Document