Title :
The research of the stochastic reward net model for the cluster tool in serial-parallel mode
Author :
Zheng, Xiuhong ; Hu, Jingtao ; Yu, Haibin
Author_Institution :
Key Lab. of Ind. Inf., Shenyang Inst. of Autom., Shenyang, China
Abstract :
The proliferation of cluster tools in semiconductor manufacturing motivates an understanding of how basic parameters determine the performance of cluster tools. This paper presents three general stochastic reward net models of serial-parallel cluster tools to describe the processing procedure of them. They help to effectively analyze and evaluate the performance of cluster tools on different demands.
Keywords :
Petri nets; manufacturing systems; semiconductor device manufacture; stochastic processes; semiconductor manufacturing; serial-parallel cluster tools; stochastic reward net model; Analytical models; Load modeling; Robots; Schedules; Semiconductor device modeling; Stochastic processes; Throughput; The cluster tool; model; serial-parallel; stochastic reward net; throughput;
Conference_Titel :
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-8036-4
DOI :
10.1109/ICEICE.2011.5777418
