Title :
An Efficient Loop Detection and Removal Algorithm for 3D Surface-Based Lithography Simulation
Author :
Helmsen, John J. ; Scheckler, Edward W. ; Neureuther, Andrew R. ; Séquin, Carlo H.
Author_Institution :
University of California, Berkeley
fDate :
31 May-1 Jun 1992
Keywords :
Circuit simulation; Circuit testing; Data structures; Educational institutions; Fabrication; Integrated circuit testing; Laboratories; Lithography; Surface topography; Three-dimensional integrated circuits;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.673838
