Title :
RF-MEMS resonator design for parameter characterization
Author :
Roy, Ambarish ; Barber, Bradley P. ; Prasad, Kanti
Author_Institution :
ECE Dept., Univ. of Massachusetts, Lowell, MA, USA
Abstract :
A unique methodology involving bulk acoustic wave (BAW) solidly mounted resonators (SMRs) is presented in this paper which can be used to extract precise materials information that is vital to designing high performance RF filters. The novel approach allows simultaneous extraction of multiple parameters for multiple materials. Changes in materials properties over temperature can also be extracted.
Keywords :
bulk acoustic wave devices; micromechanical resonators; radiofrequency filters; RF filters; RF-MEMS resonator design; bulk acoustic wave; parameter characterization; parameter extraction; solidly mounted resonators; Acoustic materials; Acoustic waves; Data mining; Information filtering; Information filters; Material properties; Radio frequency; Radiofrequency microelectromechanical systems; Resonator filters; Temperature;
Conference_Titel :
SOC Conference, 2009. SOCC 2009. IEEE International
Conference_Location :
Belfast
Print_ISBN :
978-1-4244-4940-8
Electronic_ISBN :
978-1-4244-4941-5
DOI :
10.1109/SOCCON.2009.5398037
