Title :
Temperature measurements of semiconductor devices - a review
Author :
Blackburn, David L.
Author_Institution :
Semicond. Electron. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
Keywords :
reviews; semiconductor device testing; temperature measurement; electrical measurement; optical measurement; physically contacting measurement; reviews; semiconductor devices; temperature measurements; Contacts; NIST; Optical devices; Optical sensors; Semiconductor device measurement; Semiconductor devices; Spatial resolution; Temperature measurement; Temperature sensors; Transducers;
Conference_Titel :
Semiconductor Thermal Measurement and Management Symposium, 2004. Twentieth Annual IEEE
Print_ISBN :
0-7803-8363-X
DOI :
10.1109/STHERM.2004.1291304
