DocumentCode
3277134
Title
Temperature measurements of semiconductor devices - a review
Author
Blackburn, David L.
Author_Institution
Semicond. Electron. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
2004
fDate
9-11 Mar 2004
Firstpage
70
Lastpage
80
Abstract
There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
Keywords
reviews; semiconductor device testing; temperature measurement; electrical measurement; optical measurement; physically contacting measurement; reviews; semiconductor devices; temperature measurements; Contacts; NIST; Optical devices; Optical sensors; Semiconductor device measurement; Semiconductor devices; Spatial resolution; Temperature measurement; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Thermal Measurement and Management Symposium, 2004. Twentieth Annual IEEE
ISSN
1065-2221
Print_ISBN
0-7803-8363-X
Type
conf
DOI
10.1109/STHERM.2004.1291304
Filename
1320455
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