Title :
A robust Numerical Procedure for Stress Dependent 2DOxidation Simulation
Author :
Collard, D. ; Baccus, B. ; Hamonic, B.
Author_Institution :
ISEN / IEMN
fDate :
31 May-1 Jun 1992
Keywords :
Convergence of numerical methods; Oxidation; Plastics; Predictive models; Robustness; Shape; Silicon; Stability; Thermal stresses; Topology;
Conference_Titel :
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN :
0-7803-0516-7
DOI :
10.1109/NUPAD.1992.673841
