Dispersion and attenuation characteristics of Suspended Microstrip line on multilayer lossy silicon substrate at 60 GHz

Author

Prasad, Manish ; Gaur, Arun Singh ; Sharma, Vivek Kr ; Pathak, Nagendra P.

Author_Institution

Dept. of Electron.&Comput. Eng., Indian Inst. of Technol., Roorkee

fYear

2008

fDate

15-19 Sept. 2008

Firstpage

1

Lastpage

2

Abstract

In this paper, transmission line parameters such as characteristic impedance Z₀, effective dielectric constant epsiv_eff, attenuation constant alpha of Suspended Microstrip line on multilayer low resistivity silicon substrate are investigated. Effect of variation in the thickness of Si₃N₄, polyimide and metal layer are studied using HFSS. Due to suspended nature, significant reduction in transmission loss is observed in the simulation.

Keywords

dispersion (wave); electric impedance; elemental semiconductors; microstrip lines; multilayers; permittivity; polymers; silicon; silicon compounds; substrates; transmission lines; HFSS; Si; Si₃N₄; attenuation characteristics; attenuation constant; characteristic impedance; dielectric constant; dispersion characteristics; frequency 60 GHz; high-frequency structure simulator; metal layer; microstrip line; multilayer lossy silicon substrate; multilayer low resistivity silicon substrate; polyimide layer; transmission line parameters; transmission loss; Attenuation; Conductivity; Dielectric constant; Dielectric substrates; Impedance; Microstrip; Nonhomogeneous media; Polyimides; Silicon; Transmission lines; CMOS grade Silicon; CMOS millimeter wave integrated circuits; Discontinuities; Dispersion; Equivalent Circuits; Multilayer Suspended Microstrip Line;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on

Conference_Location

Pasadena, CA

Print_ISBN

978-1-4244-2119-0

Electronic_ISBN

978-1-4244-2120-6

Type

conf

DOI

10.1109/ICIMW.2008.4665716

Filename

4665716