DocumentCode
3279624
Title
Thin-film measurements with THz-radiation
Author
Ellrich, F. ; Theuer, M. ; Torosyan, G. ; Jonuscheit, J. ; Beigang, R.
Author_Institution
Fraunhofer Inst. for Phys. Meas. Tech. IPM, Kaiserslautern
fYear
2008
fDate
15-19 Sept. 2008
Firstpage
1
Lastpage
2
Abstract
The potential of short terahertz pulses for thin-film measurements of materials opaque in the visible range is demonstrated. Layer thicknesses down to 10 mum have been determined in transmission as well as in reflection measuring mode and complex multilayer structures in the sub-wavelength range have been resolved with this technique.
Keywords
multilayers; polymer films; reflection; refractive index; silicon; submillimetre waves; visible spectra; Si; complex multilayer structure; layer thickness; plastic films; reflection measuring mode; refractive index; terahertz pulse radiation; transmission measuring mode; visible range; Electromagnetic measurements; Mechanical variables measurement; Optical reflection; Particle measurements; Pulse measurements; Refractive index; Submillimeter wave measurements; Thickness measurement; Transistors; Ultrasonic variables measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on
Conference_Location
Pasadena, CA
Print_ISBN
978-1-4244-2119-0
Electronic_ISBN
978-1-4244-2120-6
Type
conf
DOI
10.1109/ICIMW.2008.4665779
Filename
4665779
Link To Document